Trek Model 1100TN Electrostatic Force Microscope (EFM)

The Trek Model 1100TN Electrostatic Force Microscope (EFM) enables voltage distribution measurements with a very high spatial resolution – better than 10μm – which is well beyond the capability of typical electrostatic voltmeters. Trek's EFM can also measure voltage distribution across a much larger surface area as compared to a scanning probe microscope when operated under atmospheric conditions. Trek's EFM employs a feedback voltage to the detector which is equal to the measured voltage thus preventing arcing between the detector and the surface under test.

Applications

• Measurement of antistatic bags, Si wafer
• Electrophotography material testing
• Photovoltaic materials evaluation
• MEMS testing

Features and Benefits

• Can be used in atmosphere conditions
• Spatial resolution is better than 10 μm
• Three measurement modes:
  • - Static - Line Profile - 3D Mapping