The Trek Model 1100TN Electrostatic Force Microscope (EFM) enables voltage distribution measurements with a very high spatial resolution – better than 10μm – which is well beyond the capability of typical electrostatic voltmeters. Trek's EFM can also measure voltage distribution across a much larger surface area as compared to a scanning probe microscope when operated under atmospheric conditions. Trek's EFM employs a feedback voltage to the detector which is equal to the measured voltage thus preventing arcing between the detector and the surface under test.
Applications
- Measurement of antistatic bags, Si wafer
- Electrophotography material testing
- Photovoltaic materials evaluation
- MEMS testing
Features and Benefits
- Can be used in atmosphere conditions
- Spatial resolution is better than 10 μm
- Three measurement modes:
- - Static - Line Profile - 3D Mapping
Request for Quotation
| Voltage Range: | ±1 kV |
| Voltage Sensitivity: | Better than 100 mV |
| Accuracy: | Better than 0.5% of full scale |
| Incremental Step: | 1 μm, minimum (detector) |
| Detector Tip: | 5 μm X 5 μm |
| Measurement Area: | 5 mm X 5 mm |
